Microelectromechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3673, Issue , 1999, Pages 210-218

  Bobbio, S M ^a   Smith, S W ^a   Zara, J ^a   Goodwin Johansson, S ^a   Hudak, J ^a   DuBois, T ^a   Leamy, H ^a   Godwin, J ^a   Pennington, M ^a  

^a UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EQUIPMENT TESTING; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; OPTICAL DEVICES; TRANSDUCERS; ULTRASONIC DEVICES;

INTEGRATED FORCE ARRAY; MECHANICAL SCANNER; MICROELECTROMECHANICAL ACTUATOR; SPIRAL WOUND TRANSDUCER;

ACTUATORS;

EID: 0033349183     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)