Novel concepts for high voltage junction termination techniques using very deep trenches

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 1999, Pages 67-70

  Dragomirescu, D ^a   Charitat, G ^a   Morancho, F ^a   Rossel, P ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN OF SOLIDS; NUMERICAL METHODS; SEMICONDUCTING SILICON;

HIGH VOLTAGE JUNCTION TERMINATION METHODS; TRENCH TERMINATION METHODS;

HETEROJUNCTIONS;

EID: 0033348828     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (17)