Comparison of shallow implantation between B, BF2 and B10H14 by molecular dynamics simulation

Proceedings of the International Conference on Ion Implantation Technology

Volumn 2, Issue , 1999, Pages 764-766

  Webb, Roger ^a   Kerford, Michelle ^a   Emerson, Neil ^a   Smith, Roger ^a   Harrison, Martin ^a   Foad, Majeed ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; BORON COMPOUNDS; COMPUTER SIMULATION; ION BEAMS; MOLECULAR DYNAMICS; SEMICONDUCTOR DOPING; SEMICONDUCTOR JUNCTIONS;

BORON DIFLUORIDE;

ION IMPLANTATION;

EID: 0033348464     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)