Development of focused micro-sized particle beam technology and its application to micro-fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3673, Issue , 1999, Pages 141-147

  Egashira, Mitsuru ^a   Shinya, Norio ^a   Saito, Hideaki ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; FOCUSING; LENSES; MICROELECTRONIC PROCESSING; POWDERS; SUBSTRATES;

BEAM DEFLECTOR; PARTICLE BEAM DRAWING APPARATUS; PARTICLE BEAM GUN; PARTICLE CHARGING; POWDER PARTICLES;

PARTICLE BEAMS;

EID: 0033347839     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)