FT-IR based ellipsometer using high-quality Brewster-angle polarizers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3754, Issue , 1999, Pages 285-293

  Kaplan, Simon G ^a   Hanssen, Leonard M ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; GONIOMETERS; INFRARED SPECTROMETERS; LIGHT POLARIZATION; LIGHT REFLECTION; LIGHT TRANSMISSION; OPTICAL BEAM SPLITTERS; REFRACTIVE INDEX; SILICON WAFERS;

CHEVRON GEOMETRY; FOURIER TRANSFORM INFRARED SPECTROMETER; HIGH QUALITY BREWSTER ANGLE POLARIZERS; INFRARED ELLIPSOMETER;

ELLIPSOMETRY;

EID: 0033347240     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)