Thick porous silicon layers as sacrificial material for low power gas sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3892, Issue , 1999, Pages 184-191

  Bartels, Olaf ^a   Splinter, Alexandra ^a   Storm, Uwe ^a   Binder, Josef ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING; HEAT LOSSES; MASKS; POROUS SILICON;

FREE-STANDING THERMALLY DECOUPLED GAS SENSOR MEMBRANES;

CHEMICAL SENSORS;

EID: 0033346857     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)