Temperature control of diffusion/CVD furnaces using robust multivariable loop-shaping techniques

Proceedings of the IEEE Conference on Decision and Control

Volumn 4, Issue , 1999, Pages 4192-4197

  Tsakalis, Kostas ^a   Flores Godoy, Jose Job ^a   Stoddard, Kevin ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FURNACES; LINEAR CONTROL SYSTEMS; MATHEMATICAL MODELS; ROBUSTNESS (CONTROL SYSTEMS);

CHEMICAL VAPOR DEPOSITION FURNACES; ROBUST MULTIVARIABLES LOOPSHAPING TECHNIQUES;

TEMPERATURE CONTROL;

EID: 0033345419     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)