Application of Monte Carlo simulation to structural analysis by soft X-ray emission spectroscopy for a silicide/Si-bulk system

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 11, 1999, Pages 6544-6548

  Klnoshita, Akimasa ^a   Hirai, Masaaki ^a   Kusaka, Masahiko ^a   Iwami, Motohiro ^a  

^a OKAYAMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; EMISSION SPECTROSCOPY; MICROANALYSIS; MONTE CARLO METHODS; MULTILAYERS; SILICON; SILICON COMPOUNDS; SUBSTRATES; X RAY SPECTROSCOPY;

SOFT X RAY EMISSION SPECTROSCOPY (SXES);

INTERFACES (MATERIALS);

EID: 0033344574     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.6544     Document Type: Article

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