Development of a coaxial type vacuum arc evaporation source

Proceedings of the International Conference on Ion Implantation Technology

Volumn 2, Issue , 1999, Pages 1148-1150

  Yamamoto, Y ^a   Agawa, Y ^a   Hara, Y ^a   Amano, S ^a   Chayahara, A ^a   Horino, Y ^a   Fujii, K ^a  

^a ULVAC INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CATHODES; DEPOSITION; ELECTRIC ARCS; ULTRATHIN FILMS; VACUUM;

VACUUM ARC EVAPORATION SOURCES;

EVAPORATION;

EID: 0033344133     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)