Fabrication of pop-up detector arrays on Si wafers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 422-431

  Li, Mary J ^a   Allen, Christine A ^a   Gordon, Scott A ^a   Kuhn, Jonathan L ^a   Mott, David B ^a   Stahle, Caroline K ^a   Wang, Liqin L ^a  

^a RAYTHEON COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ARRAYS; COMPUTER SIMULATION; ETCHING; LASER APPLICATIONS; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SILICON SENSORS; SILICON WAFERS; STRESS CONCENTRATION; THIN FILMS;

ANISOTROPIC ETCHING; MICROFABRICATION; POP-UP DETECTORS; THERMAL DETECTORS;

MICROELECTRONIC PROCESSING;

EID: 0033343917     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)