Micro cycloid-gear system fabricated by multi-exposure LIGA technique

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3875, Issue , 1999, Pages 164-171

  Hirata, Toru ^a   Chung, Song Jo ^a   Hein, Herbert ^a   Akashi, Tomoyuki ^a   Mohr, Juergen ^a  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; BONDING; DISKS (MACHINE COMPONENTS); ELECTRIC MOTORS; FABRICATION; GEARS; MICROMACHINING; TORQUE; X RAY LITHOGRAPHY;

CYCLOID GEAR; DIE BONDING MACHINE; GEAR RATIO; HEIGHT CONTROL; MICROCYCLOID GEAR SYSTEM; ULTRAVIOLET LITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 0033343910     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)