Dynamic simulation of electron-beam-induced chargingup of insulators

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 12 B, 1999, Pages 7176-7179

  Kotera, Masatoshi ^a   Yamaguchi, Kiyoshi ^a   Suga, Hiroshi ^a  

^a OSAKA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Charge accumulation; Electric field; Electron beam induced conductivity; Monte Carlo simulation; Poisson equation

Indexed keywords

CARRIER MOBILITY; COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC INSULATING MATERIALS; ELECTRON IRRADIATION; MONTE CARLO METHODS; POISSON DISTRIBUTION; POLYMETHYL METHACRYLATES; TRANSPORT PROPERTIES;

CHARGE CONTINUITY EQUATION; ELECTRON-BEAM-INDUCED CONDUCTIVITY; OHM LAW;

NANOTECHNOLOGY;

EID: 0033343883     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.7176     Document Type: Article

References (20)

1. A. R. Frederickson and S. Woolf: IEEE Trans. NS-29 (1982) 2004.
2. M. Kotera and H. Suga: J. Appl. Phys. 63 (1988) 261.
3. M. Kotera, R. Ijichi, T. Fujiwara, H. Suga and D. B. Wittry: Jpn. J. Appl. Phys. 29 (1990) 2277.
4. S. Luo and D. C. Joy: Scann. Microsc. 2 (1988) 1901.
5. M. Kotera, T. Fujiwara, H. Suga and D. B. Wittry: Jpn. J. Appl. Phys. 29 (1990) 2312.
6. M. Kotera, T. Fujiwara, N. Kanai and H. Suga: Jpn. J. Appl. Phys. 30 (1991) 3287.
7. M. Kotera, S. Yamaguchi, T. Fujiwara and H. Suga: Jpn. J. Appl. Phys. 31 (1992) 4531.
8. M. Kotera, S. Yamaguchi, S. Umegaki and H. Suga: Jpn. J. Appl. Phys. 33 (1994) 7144.
9. M. Kotera and K. Yamaguchi: Jpn. J. Appl. Phys. 37 (1998) 7024.
10. R. Tanaka, H. Sunaga and N. Tamura: IEEE Trans. NS-26 (1979) 4670.
11. M. Kotera and H. Suga: Proc. XIIIth Int. Congr. Electron Microscopy (1994) p. 763.
12. H. Suga, H. Tadokoro and M. Kotera: Proc. XIVth Int. Congr. Electron Microscopy, (1998) p. 177.
13. M. Kotera: Electron Microsc. 33 (1998) 166 [in Japanese].
14. M. Kotera: J. Surf. Anal. 6 (1999) 22 [in Japanese].
15. J. Laberrigue-Frolow and P. Radvanyi: J. Phys. Radium. 17 (1956) 944.
16. J. Llacer and E. L. Garwin: J. Appl. Phys. 40 (1969) 2776.
17. Z. G. Song, C. K. Ong and H. Gong: Appl. Surf. Sci. 119 (1997) 169.
18. D. M. Taylor: J. Phys. D: Appl. Phys. 11 (1978) 2443.
19. W. Liu, J. Ingino and R. F. W. Peace: J. Vac. Sci. & Technol. B 13 (1995) 1979.
20. H. Fujioka, K. Nakamae and K. Ura: Proc. XIth Int. Congr. Electron Microsc. (1986) p. 643.