메뉴 건너뛰기




Volumn 98, Issue 3-4, 1999, Pages 195-207

Numerical simulation of interface crack in thin films

Author keywords

Crack growth; Damage growth; de adhesion; Interface crack; Interface damage; Thin film

Indexed keywords

ADHESION; BUCKLING; COMPRESSIVE STRESS; CRACK PROPAGATION; FAILURE ANALYSIS; FILM GROWTH; FINITE ELEMENT METHOD; INTERFACES (MATERIALS); SUBSTRATES; THIN FILMS;

EID: 0033342907     PISSN: 03769429     EISSN: None     Source Type: Journal    
DOI: 10.1023/a:1018326728621     Document Type: Article
Times cited : (16)

References (26)
  • 1
    • 0019204411 scopus 로고
    • On the problem of diffusion in solids
    • Aifantis, E.C. (1980). On the problem of diffusion in solids. Acta Mechanica 37, 265-296.
    • (1980) Acta Mechanica , vol.37 , pp. 265-296
    • Aifantis, E.C.1
  • 2
    • 0001526041 scopus 로고
    • Origins of the Universal binding-energy relation
    • Banerjea, A. and Smith, J.R. (1988). Origins of the Universal binding-energy relation. Physical Review B37, 6632-6645.
    • (1988) Physical Review , vol.B37 , pp. 6632-6645
    • Banerjea, A.1    Smith, J.R.2
  • 3
    • 0019707231 scopus 로고
    • One dimensional modelling of failure in laminated plates by delamination buckling
    • Chai, H., Babcock, C.D. and Knauss, W.G. (1981). One dimensional modelling of failure in laminated plates by delamination buckling. International Journal of Solids and Structures 17, 1069-1083.
    • (1981) International Journal of Solids and Structures , vol.17 , pp. 1069-1083
    • Chai, H.1    Babcock, C.D.2    Knauss, W.G.3
  • 4
    • 0027578647 scopus 로고
    • A simple model for the formation of compressive stress in thin films by ion bombardment
    • Davis, C.A. (1993). A simple model for the formation of compressive stress in thin films by ion bombardment. Thin Solid Films 226, 30-34.
    • (1993) Thin Solid Films , vol.226 , pp. 30-34
    • Davis, C.A.1
  • 5
    • 0014752496 scopus 로고
    • Aluminum films deposited by rf sputtering
    • d'Heurle, F.M. (1970). Aluminum films deposited by rf sputtering. Metallurgical Transactions 1, 725-732.
    • (1970) Metallurgical Transactions , vol.1 , pp. 725-732
    • D'Heurle, F.M.1
  • 7
    • 0000890524 scopus 로고
    • Theory of bimetallic interfaces
    • Ferrante, J. and Smith, J.R. (1985). Theory of bimetallic interfaces. Physical Review B31, 3427-3434.
    • (1985) Physical Review , vol.B31 , pp. 3427-3434
    • Ferrante, J.1    Smith, J.R.2
  • 8
    • 77956671586 scopus 로고    scopus 로고
    • Delamination of compressed thin films
    • Gioia, G. and Ortiz, M. (1997). Delamination of compressed thin films. Advances in Applied Mechanics 33, 119-192.
    • (1997) Advances in Applied Mechanics , vol.33 , pp. 119-192
    • Gioia, G.1    Ortiz, M.2
  • 9
    • 0026815322 scopus 로고
    • Growth and configurational stability of circular, buckling-driven film delaminations
    • Hutchinson, J.W., Thouless, M.D. and Liniger, E.G. (1992). Growth and configurational stability of circular, buckling-driven film delaminations. Acta Metallurgica 40, 295-308.
    • (1992) Acta Metallurgica , vol.40 , pp. 295-308
    • Hutchinson, J.W.1    Thouless, M.D.2    Liniger, E.G.3
  • 10
    • 0029250911 scopus 로고
    • Buckling patterns in diamond-like carbon films
    • Iyer, S.B., Harshavardhan, K.S. and Kumar, V. (1995). Buckling patterns in diamond-like carbon films. Thin Solid Films 256, 94-100.
    • (1995) Thin Solid Films , vol.256 , pp. 94-100
    • Iyer, S.B.1    Harshavardhan, K.S.2    Kumar, V.3
  • 11
    • 0030729222 scopus 로고    scopus 로고
    • In-situ and real time room temperature oxidation studies of fee TiN thin films
    • Logothetidis, S. and Barborica, A. (1997). In-situ and real time room temperature oxidation studies of fee TiN thin films. Microelectronic Engineering 33, 309-316.
    • (1997) Microelectronic Engineering , vol.33 , pp. 309-316
    • Logothetidis, S.1    Barborica, A.2
  • 12
    • 0021522097 scopus 로고
    • Measurement of adherence of residually stressed thin films by indentation. I. Mechanics of interface delamination
    • Marshall, D.B. and Evans, A.G. (1984). Measurement of adherence of residually stressed thin films by indentation. I. Mechanics of interface delamination. Journal of Applied Physics 56, 2632-2638.
    • (1984) Journal of Applied Physics , vol.56 , pp. 2632-2638
    • Marshall, D.B.1    Evans, A.G.2
  • 13
    • 0000721676 scopus 로고
    • Generation and applications of compressive stress induced by low energy ion bombardment
    • McKenzie, D.R. (1993). Generation and applications of compressive stress induced by low energy ion bombardment. Journal of Vacuum Science and Technology B 11, 1928-1935.
    • (1993) Journal of Vacuum Science and Technology B , vol.11 , pp. 1928-1935
    • McKenzie, D.R.1
  • 14
    • 0023410904 scopus 로고
    • A continuum model for void nucleation by inclusion debonding
    • Needleman, A. (1987). A continuum model for void nucleation by inclusion debonding. Journal of Applied Mechanics 54, 525-531.
    • (1987) Journal of Applied Mechanics , vol.54 , pp. 525-531
    • Needleman, A.1
  • 15
    • 0000941112 scopus 로고
    • A finite element analysis of configurational stability and finite growth of buckling driven delamination
    • Nilsson, K.F. and Giannakopoulos, A.E. (1995). A finite element analysis of configurational stability and finite growth of buckling driven delamination. Journal of the Mechanics and Physics of Solids 43, 1983-2021.
    • (1995) Journal of the Mechanics and Physics of Solids , vol.43 , pp. 1983-2021
    • Nilsson, K.F.1    Giannakopoulos, A.E.2
  • 16
    • 24244464577 scopus 로고
    • Universal binding energy curves for metals and bimetallic interfaces
    • Rose, J.H., Ferrante, J. and Smith, J.R. (1981). Universal binding energy curves for metals and bimetallic interfaces. Physical Review Letters 47, 675-678.
    • (1981) Physical Review Letters , vol.47 , pp. 675-678
    • Rose, J.H.1    Ferrante, J.2    Smith, J.R.3
  • 17
    • 0001753062 scopus 로고
    • Universal features of the equation of state of metals
    • Rose, J.H., Smith, J.R., Guinea, F. and Ferrante, J. (1984). Universal features of the equation of state of metals. Physical Review B29, 2963-2969.
    • (1984) Physical Review , vol.B29 , pp. 2963-2969
    • Rose, J.H.1    Smith, J.R.2    Guinea, F.3    Ferrante, J.4
  • 18
    • 0021517474 scopus 로고
    • Measurements of adherence of residually stressed thin films by indentation. II. Experiments with ZnO/Si
    • Rossington, C., Evans, A.G., Marshall, D.B. and Khuri-Yakub, B.T. (1984). Measurements of adherence of residually stressed thin films by indentation. II. Experiments with ZnO/Si. Journal of Applied Physics 56, 2639-2644.
    • (1984) Journal of Applied Physics , vol.56 , pp. 2639-2644
    • Rossington, C.1    Evans, A.G.2    Marshall, D.B.3    Khuri-Yakub, B.T.4
  • 19
    • 44049109778 scopus 로고
    • The relation between crack growth resistance and fracture process parameters in elastic-plastic solids
    • Tvergaard, V. and Hutchinson, J.W. (1992). The relation between crack growth resistance and fracture process parameters in elastic-plastic solids. Journal of the Mechanics and Physics of Solids 40, 1377-1397.
    • (1992) Journal of the Mechanics and Physics of Solids , vol.40 , pp. 1377-1397
    • Tvergaard, V.1    Hutchinson, J.W.2
  • 21
    • 0042915236 scopus 로고
    • Ph.D Thesis, Brown University, Providence, RI (available through University Microfilms International, Ann Arbor, Michigan)
    • Varias, A.G. (1991). Failure Studies of Bimaterial Interfaces and Constraint Ductile Layers, Ph.D Thesis, Brown University, Providence, RI (available through University Microfilms International, Ann Arbor, Michigan).
    • (1991) Failure Studies of Bimaterial Interfaces and Constraint Ductile Layers
    • Varias, A.G.1
  • 22
    • 0032072737 scopus 로고    scopus 로고
    • Constrained effects during stable transient crack growth
    • Varias, A.G. (1998). Constrained effects during stable transient crack growth. Computational Mechanics 21, 316-329.
    • (1998) Computational Mechanics , vol.21 , pp. 316-329
    • Varias, A.G.1
  • 24
    • 21544431995 scopus 로고
    • An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering
    • Windischmann, H. (1987). An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering. Journal of Applied Physics 62, 1800-1807.
    • (1987) Journal of Applied Physics , vol.62 , pp. 1800-1807
    • Windischmann, H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.