Automatic defect pattern detection on LSI wafers using image processing techniques

IEICE Transactions on Electronics

Volumn E82-C, Issue 6, 1999, Pages 1003-1012

  Maruo, K ^a   Shibata, T ^b   Yamaguchi, T ^a   Ichikawa, M ^a   Ohmi, T ^c  

^a ADVANTEST CORPORATION   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; EDGE DETECTION; FEATURE EXTRACTION; IMAGE PROCESSING; IMAGING TECHNIQUES; INTEGRATED CIRCUIT MANUFACTURE; SCANNING ELECTRON MICROSCOPY; WAVELET TRANSFORMS;

DEFECT DETECTION; HOUGH TRANSFORM; IMAGE RECOGNITION;

ULSI CIRCUITS;

EID: 0033341811     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)