Positive control of uniformity in ribbon beams for implantation of flat-panel displays

Proceedings of the International Conference on Ion Implantation Technology

Volumn 1, Issue , 1999, Pages 354-357

  White, N R ^a   Satoh, S ^a   Bell, E W ^a   Sieradzki, M ^a   Geary, C ^a   Degawa, T ^a   Shimamura, K ^a   Ochi, M ^a  

^a MITSUI ENGINEERING AND SHIPBUILDING CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FLAT PANEL DISPLAYS; ION BEAMS; SPUTTERING;

BEAM UNIFORMITY; RIBBON BEAMS;

ION IMPLANTATION;

EID: 0033340248     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)