|
|
|
Volumn 2, Issue , 1999, Pages 865-868
|
|
Thermal oxidation and characterization for surface layers of Al implanted TiN films
a
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
ALUMINUM;
CHEMICAL BONDS;
ELECTROPLATING;
FILM PREPARATION;
ION IMPLANTATION;
OXIDATION RESISTANCE;
THERMOOXIDATION;
X RAY CRYSTALLOGRAPHY;
X RAY PHOTOELECTRON SPECTROSCOPY;
HOLLOW CATHODE DISCHARGE ION PLATING;
TITANIUM NITRIDE;
|
|
EID: 0033340206
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (1)
|
|
References (7)
|
