Weakly Index Guided Buried-Stripe Type 980 nm Laser Diodes Grown by a Combination of Gas Source Molecular Beam Epitaxy and Metalorganic Vapor Phase Epitaxy with an AIGaAs/InGaP/GaAs Double Etch Stop Structure

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 10, 1999, Pages 5888-5897

  Horie, Hideyoshi ^a   Nagao, Satoru ^a   Shimoyama, Kenji ^a   Fujimori, Toshinari ^a  

^a MITSUBISHI CHEMICAL CORPORATION   (Japan)

Author keywords

980 nm laser diodes; Buried stripe type; Double etch stop; Semiconductor lasers; Semiconductor waveguides; Wafer uniformity; Weakly index guided design

Indexed keywords

ETCHING; METALLORGANIC VAPOR PHASE EPITAXY; MOLECULAR BEAM EPITAXY; OPTICAL WAVEGUIDES; REFRACTIVE INDEX; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR GROWTH; SILICON WAFERS;

DOUBLE ETCH STOP (DES) STRUCTURES; GAS SOURCE MOLECULAR BEAM EPITAXY (GS-MBE); WEAKLY INDEX GUIDED DESIGN;

SEMICONDUCTOR LASERS;

EID: 0033340133     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.5888     Document Type: Article

References (30)

1. M. Okayasu, T. Takeshita, M. Yamada, O. Kogure, M. Horiguchi, M. Fukuda, A. Kozen, K. Oe and S. Uehara: Electron. Lett. 25 (1989) 1563.
2. M. Fukuda, M. Okayasu, J. Temmyo and J. Nakano: IEEE J. Quantum Electron. 30 (1994) 471.
3. A. Moser, A. Oosenbrug, E. E. Latta, T. Foster and M. Gasser: Appl. Phys. Lett. 59 (1991) 2642.
4. H. Asonen, A. Ovtchinnikov, G. Zhang, J. Näppi, P. Savolainen and M. Pessa: IEEE J. Quantum Electron. 30 (1994) 415.
5. A. Kasukawa, M. Ohkubo, T. Namegaya, T. Ijichi, Y. Ikegami, N. Tsukiji, S. Namiki and Y. Shirasaki: Optoelectron. Device & Technol. 9 (1994) 219.
6. S. Ishikawa, K. Fukagai, H. Chida, T. Miyazaki, H. Fujii and K. Endo: IEEE J. Quantum Electron. 29 (1993) 1936.
7. M. Sagawa, T. Toyonaka, K. Hiramoto, K. Shinoda and K. Uomi: IEEE J. Sel. Top. Quantum Electron. 1 (1995) 189.
8. A. Shima, H. Kizuki, A. Takemoto, S. Karakida, M. Miyashita, Y. Nagai, T. Kamizato, K. Shigihara, A. Adachi, E. Omura and M. Olsubo: IEEE J. Sel. Top. Quantum Electron. 1 (1995) 102.
9. E. Desurvire: IEEE Photon. Technol. Lett. 2 (1990) 208.
10. B. Pedersen, B. A. Thompson, S. Zemon, W. J. Miniscalco and T. Wei: IEEE Photon. Technol. Lett. 4 (1992) 46.
11. J. L. Zyskind, C. R. Giles, J. R. Simpson and D. J. DiGiovanni: AT&T Tech. J. 71 (1992) 53.
12. B. Garret and J. E. A. Whiteaway: Proc. IEE Pt. J 134 (1987) 11.
13. B. Garret and J. E. A. Whiteaway: Proc. IEE Pt. J 134 (1987) 123.
14. O. Imafuji, T. Takayama, H. Sugiura, M. Yuri, II. Naito, M. Kume and K. Itoh: IEEE J. Quantum Electron. 29 (1993) 1889.
15. N. Chand, T. Henderson, J. Klem, T. Masselink, R. Fischer, Y. C. Chang and H. Morkoc: Phys. Rev. B 30 (1984) 4481.
16. T. F. Kuech, E. Veuhoff and B. S. Meyerson: J. Cryst. Growth 68 (1984) 48.
17. M. Okayasu, M. Fukuda, T. Takeshita, S. Uehara and K. Kurumada: J. Appl. Phys. 69 (1991) 8346.
18. H. C. Casey, Jr. and M. B. Panish: Heterostructure Lasers (Academic Press, New York, 1978) Chap. 2.
19. Zh. I. Alferov, S. A. Gurcvich, M. N. Mizerou and E. L. Portnoi: Sov. Phys. Tech. Phys. 20 (1976) 1617.
20. X. S. Wu, L. A. Coldren and J. L. Merz: Electron. Lett. 21 (1985) 558.
21. J. R. Lothian, J. M. Kou, F. Ren and S. J. Peatron: J. Electron. Mater. 21 (1992) 441.
22. J. R. Flemish and K. A. Jones: J. Electrochem. Soc. 140 (1993) 844.
23. S. Nagao, M. Takashima, Y. Inoue, M. Katoh and H. Gotoh: J. Cryst. Growth 111 (1991) 521.
24. P. S. Zory, Jr.: Quantum Well Lasers (Academic Press, San Diego, 1993) Chap. 8 p. 384.
25. H. Horie, H. Ohta and T. Fujimori: to be published in IEEE J. Sel. Top. Quantum Electron.
26. I. A. Avrutsky, R. Gordon, R. Clayton and J. M. Xu: IEEE J. Quantum Electron. 33 (1997) 1801.
27. H. Horie, N. Aral, Y. Yamamoto and S. Nagao: in preparation for publication.
28. M. Usami, N. Edagawa, Y. Matsushima, H. Horie, T. Fujimori, I. Sakamoto and H. Gotoh: Proc. Optical Fiber Communication Conf. '99, February, (1999) PD-39.
29. M. Nagai, K. Matsumoto, M. Morishima, H. Horie, Y. Niwata and T. Hayakawa: J. Cryst. Growth 127 (1993) 54.
30. N. Chand, J. P. van der Ziel, S. N. G. Chu and A. M. Sergent: J. Vac. Sci. Technol. B 10 (1992) 1006.