Laser diffraction wire diameter measurements: Correction of diffraction models by interferometric calibration

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3824, Issue , 1999, Pages 373-382

  Martínez Antón, Juan C ^a   Serroukh, Ibrahim ^a   Bernabeu, Eusebio ^a  

^a UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

Author keywords

cylindrical wire diameter; Diffraction metrology; Geometrical Theory ofDiffraction (GTD)

Indexed keywords

CALIBRATION; INTERFEROMETRY; OPTICAL DATA PROCESSING; OPTICAL TESTING; UNITS OF MEASUREMENT; WIRE; HELIUM NEON LASERS; MATHEMATICAL MODELS; SPATIAL VARIABLES MEASUREMENT;

DIFFRACTION MEASUREMENTS; DIFFRACTION PHENOMENON; ELECTROMAGNETIC FORMULATION; FRAUNHOFER DIFFRACTION FORMULA; GEOMETRICAL THEORY; GEOMETRICAL THEORY OF DIFFRACTION; INTERFEROMETRIC CALIBRATION; WIRE DIAMETER;

DIFFRACTION; ELECTROMAGNETIC WAVE DIFFRACTION;

DIFFRACTION METEOROLOGY; GEOMETRICAL THEORY OF DIFFRACTION; LASER DIFFRACTION; WIRE DIAMETER;

EID: 0033340082     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.364275     Document Type: Conference Paper

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