Continuous and independent monitor wafer reduction in DRAM fab

1999 IEEE International Symposium on Semiconductor Manufacturing, ISSM 1999 - Conference Proceedings

Volumn , Issue , 1999, Pages 303-306

  Watanabe, A ^a   Kobayashi, T ^a   Egi, T ^a   Yoshida, T ^a  

^a KMT Semiconductor Ltd   (Japan)

Author keywords

monitor wafer reduction; organized teams; standardiza two for monitor wafer reduction; vendor reclaim wafer usage extension

Indexed keywords

COST REDUCTION; LIFE CYCLE; MANUFACTURE; SEMICONDUCTOR DEVICE MANUFACTURE; COST EFFECTIVENESS; DYNAMIC RANDOM ACCESS STORAGE; FABRICATION;

MEASUREMENT REDUCTION; MONITOR WAFERS; ORGANIZED TEAMS; SHORT PRODUCT; VENDOR RECLAIM WAFER USAGE EXTENSION;

SILICON WAFERS; SEMICONDUCTOR DEVICE MANUFACTURE;

MONITOR WAFER REDUCTION;

EID: 0033338814     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSM.1999.808796     Document Type: Conference Paper

References (3)

1. Scmatech, Control Wafer Reduction Workshop Agenda 1/15/97
2. T. Kobayashi, ISSM98 Vb-3, pp192-195
3. GTaguchi, "Quality Engineering Series 2" pp79-8 1