Polysilicon xylophone bar magnetometers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3876, Issue , 1999, Pages 267-273

  Wickenden, Dennis K ^a   Champion, John L ^a   Givens, R Ben ^a   Kistenmacher, Thomas J ^a   Lamb, Jay L ^a   Osiander, Robert ^a  

^a JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; MAGNETIC FIELD MEASUREMENT; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES;

LORENTZ FORCE; NANOTESLAS; POLYSILICON XYLOPHONE BARS; POWER CONSUMPTION; RESONATING BAR;

MAGNETOMETERS;

EID: 0033337625     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (273)