Low sputter damage of metal single crystalline surfaces investigated with medium energy ion scattering spectroscopy

Applied Surface Science

Volumn 150, Issue 1, 1999, Pages 235-243

  Moon, Dae Won ^a   Ha, Yongho ^b   Kim, Hyun Kyung ^a   Kim, Kyung Joong ^a   Kim, Hong Seung ^b   Lee, Jeong Yong ^b   Kim, Sehun ^b  

^a Korea Research Institute of Standards and Science   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; CRYSTAL DEFECTS; ELECTRON ENERGY LEVELS; ION BOMBARDMENT; LOW ENERGY ELECTRON DIFFRACTION; PLATINUM; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SPUTTERING; SURFACE STRUCTURE; TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY;

LOW SPUTTER DAMAGE; MEDIUM ENERGY ION SCATTERING SPECTROSCOPY; METALLIC SINGLE CRYSTALLINE;

SINGLE CRYSTALS;

EID: 0033337122     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00249-4     Document Type: Article

References (12)

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