Dependence of cracking behavior of sol-gel films on symmetries of substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3896, Issue , 1999, Pages 680-686

  Cheng, S D ^a   Zhou, Y ^a   Kam, C H ^a   Que, W X ^a   Lam, Y L ^a   Chan, Y C ^a   Gan, W S ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRACK PROPAGATION; ELASTIC MODULI; ELASTIC WAVES; LIGHT SCATTERING; MATHEMATICAL MODELS; OPTICAL MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SOL-GELS; SUBSTRATES;

BIAXIAL ELASTIC MODULUS; DYNAMIC METHOD; SOL-GEL FILM; STATIC METHOD;

OPTICAL FILMS;

EID: 0033336755     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.370383     Document Type: Conference Paper

References (10)