Fabrication of CVD-SiC thin shells for x-ray optics applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3766, Issue , 1999, Pages 338-349

  Goela, Jitendra S ^a   Pickering, Michael A ^a   Cohen, Lester M ^a  

^a ROHM AND HAAS COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; DENSITY (SPECIFIC GRAVITY); ELASTIC MODULI; GOLD; OPTICAL TELESCOPES; THERMAL CONDUCTIVITY; X RAYS;

THIN SHELLS; X RAY OPTICS;

SILICON CARBIDE;

EID: 0033336753     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)