Magnetic analysis of a micromachined magnetic actuator using the finite element method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3893, Issue , 1999, Pages 127-136

  Ko, C H ^a   Yang, J J ^a   Chiou, J C ^a   Chen, S C ^a   Kao, T H ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COMPUTER SIMULATION; ELECTROPLATING; FINITE ELEMENT METHOD; MAGNETIC FIELDS; MATHEMATICAL MODELS;

DESIGN OF EXPERIMENT (DOE); MAGNETIC FORCE;

MICROACTUATORS;

EID: 0033336276     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)