Surface roughness measurement with optical scatterometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3897, Issue , 1999, Pages 570-577

  Saarinen, Jyrki ^a   Kallioniemi, Ilkka ^a   Niinisto, Ari ^a   Friberg, Ari T ^a  

^a Heptagon Oy   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT SCATTERING; NEURAL NETWORKS; NUMERICAL ANALYSIS; OPTICAL CORRELATION; OPTICAL VARIABLES MEASUREMENT; RANDOM PROCESSES; ROUGHNESS MEASUREMENT;

ELECTROMAGNETIC SCATTERING THEORY; OPTICAL SCATTEROMETRY;

SURFACE ROUGHNESS;

EID: 0033336270     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)