Process technologies for high-resolution infrared detectors based on LiTaO3

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3892, Issue , 1999, Pages 233-240

  Norkus, Volkmar ^a   Gerlach, Gerald ^a   Hofmann, Guenter ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CHEMICAL POLISHING; DEPOSITION; ETCHING; LITHIUM COMPOUNDS; PYROELECTRICITY;

CHEMICAL MECHANICAL POLISHING (CMP); HIGH-RESOLUTION INFRARED DETECTORS; ION BEAM ETCHING; LITHIUM TANTALATE;

INFRARED DETECTORS;

EID: 0033336138     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)