Novel micropump actuated by thin-film shape-memory alloy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3891, Issue , 1999, Pages 369-375

  Xu, Dong ^a   Cai, Bingchu ^a   Ding, Guifu ^a   Zhou, Yong ^a   Yu, Aibing ^a   Wang, Li ^a   Xiaolin, Zhao ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

NICKEL COMPOUNDS; PUMPS; SHAPE MEMORY EFFECT; THIN FILM DEVICES;

MICROPUMPS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033336105     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)