Precise and smooth removal from polymer surfaces by VUV excimer laser ablation at 157 nm: PMMA

Materials Research Society Symposium - Proceedings

Volumn 544, Issue , 1999, Pages 3-8

  Padeletti, G ^b   Lapczyna, M ^a   Stuke, M ^a  

^a MAX PLANCK INSTITUTE FOR BIOPHYSICAL CHEMISTRY   (Germany)

^b Istituto di Chimica dei Materiali Consiglio Nazionale Délie Ricerche   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; EXCIMER LASERS; LASER ABLATION; MORPHOLOGY; SPECTRUM ANALYSIS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

POWER SPECTRAL DENSITY ANALYSIS; SMOOTH POLYMER SURFACES;

POLYMETHYL METHACRYLATES;

EID: 0033335838     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. M. Lapczyna, M. Stuke, Appl.Phys. A66, 473, (1998)
2. M. Lapczyna, Ph.D. Thesis (1998), University of Kassel, Germany
3. M. Lapczyna, M. Stuke, Applied Physics A, (1999)
4. G. Binning, C. F. Quate and C. Gerber, Phys. Rev. Lett., 56, 930, (1997)
5. G. Padeletti, R. Larciprete, J. Vac. Sci. Techn. B16, 1762, (1998).
6. B. Bhushan, in Tribology and Mechanism of Magnetic Storage Devices (Springer, NevvYork, 1998)
7. J. C. RUSS, m Computer Assisted Microscopy, the Measurements andAnalysis ofImages (Plenum, New York, 1993)