Post develop inspection for the defect control by using Lasertec 9MD83SRII system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3873 (I, Issue , 1999, Pages 677-680

  Wang, A ^a   Shen, W ^a   Nakashima, T ^a   Ozawa, K ^a  

^a Taiwan Mask Corporation   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; DRY ETCHING; INSPECTION; MASKS; QUALITY CONTROL;

DIE-TO-DIE INSPECTION SYSTEMS;

PHOTORESISTS;

EID: 0033335456     PISSN: 0277786X     EISSN: None     Source Type: None    
DOI: 10.1117/12.373365     Document Type: Conference Paper

References (1)