Strain measurement in micrometrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3897, Issue , 1999, Pages 224-238

  Vogel, Dietmar ^a   Kuehnert, Roll ^a   Michel, Bernd ^a  

^a FRAUNHOFER IZM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CORRELATION METHODS; DEFORMATION; ELECTRONICS PACKAGING; FINITE ELEMENT METHOD; INTEGRATED CIRCUIT MANUFACTURE; INTERFEROMETRY; MICROELECTRONICS; MICROOPTICS; STRESS ANALYSIS; THERMAL STRESS;

MICRO MOIRE; MICROMETROLOGY;

STRAIN MEASUREMENT;

EID: 0033335451     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)