Stress free wafer bonded GaAs-on-Si photonic devices and circuits

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 2, Issue , 1999, Pages 427-428

  Lo, Yu Hwa ^a   Xiong, Yanyan ^a   Zhou, Y ^a   Zhu, Z H ^a   Allerman, A A ^a   Hargett, T ^a   Sieg, R ^a   Choquette, K D ^a  

^a Department of Molecular Biology and Genetics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; MORPHOLOGY; POLISHING; SEMICONDUCTING GALLIUM ARSENIDE; SILICON; SUBSTRATES; SURFACE ROUGHNESS; THERMAL EFFECTS;

CHEMICAL MECHANICAL POLISHING (CMP); PHOTONIC DEVICES; VERTICAL CAVITY SURFACE EMITTING LASERS (VCSEL);

SEMICONDUCTOR LASERS;

EID: 0033335108     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)