Electrostatic microshutters-micromirrors array for light modulation systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3878, Issue , 1999, Pages 164-171

  Pizzi, Marco ^a   Koniachkine, Valerian ^a   Bassino, Elena ^a   Sinesi, Sabino ^a   Perlo, Pietro ^a  

^a CENTRO RICERCHE FIAT   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; LIGHT MODULATION; MICROACTUATORS; MIRRORS; OPTICAL SHUTTERS; PHOTOLITHOGRAPHY; SUBSTRATES; THIN FILMS;

MICROMIRROR; MICROSHUTTER;

MICROOPTICS;

EID: 0033334452     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)