|
Volumn 3777, Issue , 1999, Pages 107-114
|
Comparative study on magnetic variable axis lenses using electrostatic and magnetic in-lens deflectors
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ABERRATIONS;
COMPUTER SIMULATION;
ELECTRODES;
ELECTRON BEAM LITHOGRAPHY;
ELECTRON OPTICS;
ELECTROSTATIC LENSES;
OPTICAL PROPERTIES;
AXIAL FOCUSING FIELD EXPANSIONS;
ELECTROSTATIC DEFLECTORS;
GAUSSIAN OPTICAL PROPERTIES;
MAGNETIC DEFLECTORS;
MOVING OBJECTIVE LENS;
OCTOPOLE ELECTRODES;
PARAXIAL RAY EQUATION;
VARIABLE AXIS LENS;
MAGNETIC LENSES;
|
EID: 0033334078
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (4)
|
References (10)
|