Parallel-plate electrostatic dual-mass oscillator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3876, Issue , 1999, Pages 198-209

  Dyck, Christopher W ^a   Allen, James J ^a   Huber, Robert J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; DAMPING; DEGREES OF FREEDOM (MECHANICS); ELECTROSTATIC DEVICES; OSCILLATORS (ELECTRONIC); RESONATORS; STRAIN;

DUAL MASS OSCILLATOR; MOTION AMPLIFIER; SURFACE MICROMACHINING; VIBRATION ABSORBER;

MICROACTUATORS;

EID: 0033333641     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)