Dual-axis maglev guiding system modeling and controller design for wafer transportation

Proceedings of the IEEE Conference on Decision and Control

Volumn 3, Issue , 1999, Pages 2623-2628

  Chen, Mei Yung ^a   Wang, Ming Jyh ^a   Fu, Li Chen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE CONTROL SYSTEMS; DEGREES OF FREEDOM (MECHANICS); MAGNETS; MATHEMATICAL MODELS; POSITION CONTROL; RAPID PROTOTYPING; SENSORS; TRACKING (POSITION);

DUAL AXIS MAGLEV; DUAL AXIS POSITIONING SYSTEM; HYBRID MAGNET; MAGLEV GUIDING SYSTEMS; PRECISION POSITIONING;

MAGNETIC LEVITATION;

EID: 0033333484     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)