Achieving desired thickness gradients on flat and curved substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3766, Issue , 1999, Pages 262-274

  Broadway, David M ^a   Platonov, Yuri Ya ^a   Gomez, Luis A ^a  

^a Osmic Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM PREPARATION; GEOMETRY; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; SUBSTRATES; THICKNESS CONTROL; THIN FILMS;

FILM THICKNESS DISTRIBUTION; MASK SHAPES; MULTILAYER THIN FILMS; NEUTRON OPTICS; THICKNESS GRADIENT; X RAY OPTICS;

OPTICAL MULTILAYERS;

EID: 0033333070     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)