|
|
|
Volumn , Issue , 1999, Pages 871-874
|
|
Low dark current double membrane poly-Si FT-technology for 2/3 inch 6M pixel CCD imagers
a
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
CAMERAS;
CHARGE COUPLED DEVICES;
GATES (TRANSISTOR);
HYDROGEN;
IMAGE PROCESSING;
INTERFACES (MATERIALS);
OPTIMIZATION;
POLYMERIC MEMBRANES;
POLYSILANES;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DOPING;
SILICA;
DIAMOND SHAPED REGIONS;
DIGITAL STILL CAMERAS;
LOW DARK CURRENTS DOUBLE MEMBRANE;
OPTIMIZED FRONT END TECHNOLOGY;
PERISTALTIC PROFILED DOPING;
IMAGE SENSORS;
|
|
EID: 0033332642
PISSN: 01631918
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (10)
|
|
References (9)
|
