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Volumn 3874, Issue , 1999, Pages 205-217
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New sensor for real time trench depth monitoring in micromachining applications
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CAMERAS;
ETCHING;
LASER BEAMS;
LIGHT POLARIZATION;
LIGHT REFLECTION;
MASKS;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
OPTICAL SENSORS;
PRISMS;
PROCESS CONTROL;
DEEP TRENCH ETCH;
END POINT DETERMINATION;
LASER INTERFEROMETRY;
TWIN SPOT INTERFEROMETRIC CAMERA;
INTERFEROMETRY;
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EID: 0033332204
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (1)
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References (5)
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