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Volumn 3857, Issue , 1999, Pages 207-214
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Fully automated membrane dispensing in nanoliter scale and its application in sensor manufacturing
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Author keywords
[No Author keywords available]
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Indexed keywords
AUTOMATION;
MEMBRANES;
MICROSENSORS;
PATTERN RECOGNITION SYSTEMS;
SEMICONDUCTING SILICON;
AUTOMATED NANOLITER DISPENSING;
SILICON BASED MULTISENSORCHIP;
DISSOLVED OXYGEN SENSORS;
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EID: 0033331456
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (2)
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References (3)
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