3-Dimensional micromachining of PTFE using synchrotron radiation direct photo-etching

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 1999, Pages 93-98

  Nishi, Nobuyoshi ^a   Katoh, Takanori ^a   Ueno, Hiroshi ^a   Konishi, Satoshi ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; PHOTOCHEMICAL REACTIONS; POLYTETRAFLUOROETHYLENES; SYNCHROTRON RADIATION; X RAY LITHOGRAPHY;

DEEP X RAY LITHOGRAPHY; DIRECT PHOTOETCHING;

MICROMACHINING;

EID: 0033331398     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)