New piezoresistive high pressure sensor utilizing combination of three-axis normal stress components

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 1999, Pages 215-220

  Toriyama, Toshiyuki ^a   Sawa, Kazuya ^a   Tanimoto, Yasutada ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; FINITE ELEMENT METHOD; FORCE MEASUREMENT; PRESSURE MEASUREMENT; SENSORS;

HIGH PRESSURE SENSORS; PIEZORESISTIVE PRESSURE SENSORS;

PIEZOELECTRIC DEVICES;

EID: 0033329930     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)