Computer simulation of optical coating deposition monitored by transmission turning point

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3862, Issue , 1999, Pages 333-336

  Zhang, Xiaohui ^a   Zhu, Weiming ^a   Li, Xiaoping ^a   Chen, Qingming ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; OPTICAL COATINGS; OPTICAL FILMS; OPTICAL INSTRUMENTS; OPTICAL MULTILAYERS; REFRACTIVE INDEX; THIN FILMS;

OPTICAL COATING DEPOSITION; THICKNESS ERROR; TURNING POINT MONITORING SYSTEM;

COMPUTER SIMULATION;

EID: 0033329568     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.361097     Document Type: Conference Paper

References (3)