Some applications of a stereographic analysis of etching shapes for structures micromachined in singly and doubly rotated quartz plates

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn 2, Issue , 1999, Pages 847-850

  Tellier, C R ^a   Leblois, T G ^a  

^a Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOLUTION; ETCHING; MICROMACHINING; QUARTZ;

STEREOGRAPHIC ANALYSIS;

PIEZOELECTRIC MATERIALS;

EID: 0033329409     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)