Cost analysis of 4X and 6X 9-inch reticles for future lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3873, Issue pt 1, 1999, Pages 243-254

  Litt, Lloyd C ^a   Kling, Mike ^a   Perkinson, Terry ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COST BENEFIT ANALYSIS; COSTS; LITHOGRAPHY; MASKS; MATHEMATICAL MODELS; SIZE DETERMINATION; SUBSTRATES;

MAGNIFICATION; OPTICAL RETICLE SIZE; RETICLES;

INSTRUMENT SCALES;

EID: 0033328212     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)