Mechanical properties of boron-doped single crystal silicon microstructures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 196-204

  Putty, Michael W ^a   Chang, Shih Chia ^a  

^a DELPHI CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BORON; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELASTIC MODULI; GLASS; NATURAL FREQUENCIES; PARTICLE BEAMS; SENSORS; SINGLE CRYSTALS; STRESSES; THERMAL EXPANSION;

BORON DOPED SINGLE CRYSTAL SILICON; BORON DOPING; HIGH ASPECT RATIO SINGLE CRYSTAL SILICON RESONANT BEAMS;

SEMICONDUCTING SILICON;

EID: 0033328197     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)