Development of poly-Si TFT in NEC

NEC Research and Development

Volumn 40, Issue 4, 1999, Pages 424-428

  Okumura, Fujio ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; IMAGE SENSORS; LIQUID CRYSTAL DISPLAYS; LOW TEMPERATURE PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS;

LIGHT VALVES; POLYCRYSTALLINE SILICON; REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (RPCVD);

THIN FILM TRANSISTORS;

EID: 0033327758     PISSN: 0547051X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (18)

1. S. Morozumi, et al., "B/W and Color LC Video Displays Addressed by Poly-Si TFTs," SID'83 Dig., p. 156, 1983.
2. T. Sameshima, et al., "XeCl Excimer Laser Annealing Used in the Fabrication of Poly-Si TFTs," Late News Abstr., ICSSDM, 17th C-3-8LN, pp. 12-13, 1985.
3. S. W. Lee, et al., "Pd Induced Lateral Crystallization of Amorphous Si Thin Film," Appl. Phys. Lett., 66, p. 1671, 1995.
4. E. Ohno, et al., "Fully-Selfaligned Al Gate Polysilicon TFT LCD Driver Circuits," Ext. Abstr. 1993 SSDM, p. 425, 1993.
5. K. Sera, et al., "Integrated Contact-Type Linear Image Sensor with Excimer Laser Annealed Poly-Si TFT Driver," SID'93 Dig. Tech. Pap., pp. 356-359, 1993.
6. H. Tanabe, et al., "Capping Layer Effect on Uniformity of Excimer Laser Crystallized Poly-Si Thin Film Transistors," MRS'96 Spring Meet. Abstr., p. 124, 1996.
7. K. Sera, et al., "Excimer-Laser Doping into Si Thin Films," J. Appl. Phys., 67, 5, pp. 2359-2363, Mar. 1990.
8. F. Okumura, et al., "High-Quality Low-Temperature Gate Oxide for Poly-Si TFTs," Electrochemical Soc. Proc., 98-22, pp. 133-142, 1999.
9. F. Okumura, et. al., "Ferroelectric Liquid-Crystal Shutter Array with Poly-Si TFT Driver," IEEE Trans. Electron Dev.,36, 9, Sept. 1989.
10. K. Sera, et al., "Poly-Si TFT Active Matrix Vacuum Fluorescent Display," Proc. Japan Display 89, pp. 700-703, 1989.
11. K. Nakamura, et al., "Fluorescent Light Source with Low-Temperature Poly-Si TFT Driver," SPIE, 2171, pp. 66-73, Feb. 1994.
12. F. Okumura, et al., "A 76-mm (3-in.) Driver-Integrated Poly-Si TFT-LCD Light Valve," SID'94 Dig., pp. 79-82, 1994.
13. H. Asada, et al., "A 2.7-in. 1.3 MPixel Driver-Integrated Poly-Si TFT-LCD for Multimedia Projectors," ISSCC Dig. Tech. Pap., pp. 190-191, 1996.
14. H. Sekine, et al., "Amplifier Compensation Method for a Poly-Si TFT Liquid-Crystal Light Valve with an Integrated Data Driver," IDRC'97, p. 45, 1997.
15. H. Haga, et al., "Compact Imaging Apparatus for a PenShaped Hand-Held Scanner," SPIE, 3019, pp. 168-173, Feb. 1997.
16. I. Fujieda, et al., "Color Pen-shaped Scanner," 5th Color Imaging Conf.: Color Science, Systems, & Applications, p. 131, 1997.
17. Y.-J. Tung, et al., "An Ultra-Low-Temperature Poly-Si TFT with Stacked Composite ECR-PECVD Gate Oxide," SID'98 Dig., pp. 887-890, 1998.
18. J. S. Im, et al., "Controlled Super-Lateral Growth of Si Films for Microstructural Manipulation and Optimization,"Phys. Stat. Sol, a, 166, pp. 603-617, 1998.