Development and terrestrial applications of a nano-g accelerometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3891, Issue , 1999, Pages 410-415

  Hartley, Frank T ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTROSTATICS; EUTECTICS; HERMETIC SEALS; MAGNETOMETERS; MICROMACHINING; NANOTECHNOLOGY; SEISMOGRAPHS; SPECTROMETERS;

NANO-G-ACCELEROMETERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033326809     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)