Micro fluidic system of micro channels with on-site sensors by silicon bulk micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3877, Issue , 1999, Pages 267-272

  Yang, Lung Jieh ^a   Kang, Shung Wen ^a  

^a TAMKANG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; GLASS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; SILICON;

MICROCHANNELS; MICROFLUIDIC SYSTEMS;

FLUIDIC DEVICES;

EID: 0033326801     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)