Hydrophilic and hydrophobic phenomena on silicon substrate for MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3893, Issue , 1999, Pages 441-447

  Kamiya, Daiki ^a   Horie, Mikio ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; MICROACTUATORS; SEMICONDUCTING SILICON; SUBSTRATES; SURFACE TENSION; WETTING;

ELECTROCHEMICAL WETTING; HYDROPHILIC/HYDROPHOBIC PHENOMENA;

MICROELECTROMECHANICAL DEVICES;

EID: 0033326290     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)