Intensity-based fiber optic pressure sensor with an Au/NiCr/Si3N4/SiO2/Si3N4 diaphragm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3897, Issue , 1999, Pages 565-569

  Park, Jaehee ^a   Kim, Myung Gyoo ^a   Kim, Yohee ^a   Kim, Kwang Soo ^a   Kim, Ilmin ^a  

^a Keimyung University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; FIBER OPTIC SENSORS; GOLD; MICROMACHINING; MULTIMODE FIBERS; NICKEL COMPOUNDS; OPTICAL FILMS; SILICA; SILICON NITRIDE; SILICON WAFERS;

NICKEL CHROMIDE;

PRESSURE TRANSDUCERS;

EID: 0033326278     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)